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UV / EB cleaning systems
UV / EB cleaning systems
Eco-friendly cleaning systems
- Ultraviolet Cleaning System
- Utilizing active oxygen separated from ozone that is generated by ultraviolet radiation, this system decomposes and removes organic pollutants by turning them into volatile substances (such as H2O, CO, CO2 and NO2)
- Ultraviolet Modifying System
- By irradiating ultraviolet radiation to organic matter, the surface layer's chemical bond is broken. The active oxygen, separated from ozone which is generated by ultraviolet radiation, bonds to molecules of the broken surface layer, turning them into a highly hydrophilic functional group (such as -OH, -CHO and -COOH)
- UV lamp
- Inline UV cleaning system
- Batch UV cleaning system
- Dielectric film light modifying system
- Light cleaning treatment system
- EB irradiation system
- Ozonizer
- All In One & Separable & Conveyable Excimer UV cleaning system
UV lamp
The UV Cleaning System is designed with environment and personnel required no solvent, which has been adopted in diversified production processes such as electric, automobile, and semiconductor. Utilization of ultraviolet radiation through a lower-pressure mercury lamp and excimer lamp is conductive to ecology. Elimination of organic substances and improvement in adherability and adhesion are actualized without thermal and humid damage to an object being irradiated.
Inline UV cleaning system
Designed according to the production line and operation type, and successive UV cleaning is enabled
Batch UV cleaning system
A compact and light weight system that actualizes easy UV cleaning intended for production and experiment
Dielectric film light modifying system
Modifies the dielectric film of the electrodes patterned inside the liquid crystal glasses
Light cleaning treatment system
Irradiates ultraviolet radiation for cleaning in wettability prior to applying films such as PI film. Used for residue elimination after resist separation
EB irradiation system
Used for experiments on multifunctionalization (water absorption and repellency) through modifying synthesized fibers
Ozonizer
High concentration ozonizer with ceramic electrodes Used for semiconductor oxide film generation and liquid crystal glass cleaning
All In One & Separable & Conveyable Excimer UV cleaning system
High-quality and high-speed cleaning is actualized through the utilization of strong ultraviolet radiation and ozone from the excimer lamp
